ꀉ

ALD/CVD素材

TMA

ThrimethylAluminum

 

AI

Hf

Nb

Ta

 

Ti

 

Si

 

Zr

 

DMAH

HAC

TBTDEN

PDMAT

TDMAT

3DMAS

BDEAS

HCDS

DMDMOS

ZAC

DimthyAliuminum Hydride

 

Aminocyclopentadienyl Hafniu

 

Tris(diethylamino)(tertiary-butylimino)(niobum)

Pentakis(dimethylamino)tantalurm

 

Tetrakisdimethylaminotitanuim

Tris(dimethylamino)silane

Bis(diethylamino)silane

 

Hexachlorodisinane

 

DIMETHY-DIMETHOXYSILANE

 

Aminocyclopentadienyl Zirconium

 OPTICAL FIBER 素材

GeCl4

SiCl4

Germanuium Terarachloride

Silicon Tetarachloride

ꀉ

SOLAR CELL 素材

TCO Film

OP Doping

Al Doping

B Doping 

DEZ

SnCl4

POCl3

TMA

TMB

TMB/H2 Mixed GAS

TMB/N2 Mixed Gas